Characterization of neutral species densities in dual frequency capacitively coupled photoresist ash plasmas by optical emission actinometry
Worsley, M. A., Bent, S. F., Fuller, N. C. M., Dalton, T.Volume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2358303
File:
PDF, 415 KB
english, 2006