Atomic layer deposition of dielectrics for carbon-based...

Thin Solid Films 2013 / 11 Vol. 546

Atomic layer deposition of dielectrics for carbon-based electronics

Kim, J., Jandhyala, S.
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Volume:
546
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.03.078
Date:
November, 2013
File:
PDF, 1.08 MB
english, 2013
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