Isotopic tracing study of the growth of silicon carbide nanocrystals at the SiO[sub 2]/Si interface by CO annealing
Pongracz, A., Hoshino, Y., DâAngelo, M., Cavellin, C. Deville, Ganem, J.-J., Trimaille, I., Battistig, G., Josepovits, K. V., Vickridge, I.Volume:
106
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3173278
File:
PDF, 511 KB
english, 2009