Investigation of the maskless lithography technique for the...

Investigation of the maskless lithography technique for the rapid and cost-effective prototyping of microfluidic devices in laboratories

Xiang, Nan, Yi, Hong, Chen, Ke, Wang, Shanfang, Ni, Zhonghua
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/2/025016
Date:
February, 2013
File:
PDF, 2.09 MB
english, 2013
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