Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chip
Yagyu, Hiromasa, Sugano, Koji, Hayashi, Shigehiko, Tabata, OsamuVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/6/014
Date:
June, 2005
File:
PDF, 481 KB
english, 2005