Micropowder blasting with nanoparticles dispersed polymer...

Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chip

Yagyu, Hiromasa, Sugano, Koji, Hayashi, Shigehiko, Tabata, Osamu
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Volume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/6/014
Date:
June, 2005
File:
PDF, 481 KB
english, 2005
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