Effect of substrate temperature on conductivity and...

Physica E: Low-dimensional Systems and Nanostructures 2013 / 9 Vol. 53

Effect of substrate temperature on conductivity and microstructures of boron-doped silicon nanocrystals in SiCx thin films

Cheng, Qiang, Zeng, Yuheng, Huang, Junjun, Dai, Ning, Yang, Ye, Tan, Ruiqin, Liang, Xingbo, Song, Weijie
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Volume:
53
Language:
english
Journal:
Physica E: Low-dimensional Systems and Nanostructures
DOI:
10.1016/j.physe.2013.04.006
Date:
September, 2013
File:
PDF, 1.27 MB
english, 2013
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