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SPIE Proceedings [SPIE 2nd international Symposium on Advanced Optical Manufacturing and Testing Technologies - Xian, China (Wednesday 2 November 2005)] 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Modeling and simulation of silicon micromechanical electrostatic comb-drive resonator
Yin, Sumin, Zhang, Y. K., Zhou, Jianming, Yang, Li, Wen, Shangming, Chen, Yaolong, Kley, Ernst-BernhardVolume:
6149
Year:
2006
Language:
english
DOI:
10.1117/12.674239
File:
PDF, 170 KB
english, 2006