Nonresonant micromachined gyroscopes with structural...

Nonresonant micromachined gyroscopes with structural mode-decoupling

Acar, C., Shkel, A.M.
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Volume:
3
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2003.815799
Date:
August, 2003
File:
PDF, 920 KB
english, 2003
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