The effects of vacuum ultraviolet radiation on low-k dielectric films
Sinha, H., Ren, H., Nichols, M. T., Lauer, J. L., Tomoyasu, M., Russell, N. M., Jiang, G., Antonelli, G. A., Fuller, N. C., Engelmann, S. U., Lin, Q., Ryan, V., Nishi, Y., Shohet, J. L.Volume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4751317
File:
PDF, 4.61 MB
english, 2012