Gas source molecular beam epitaxy growth and...

Semiconductor Science and Technology 1997 / 11 Vol. 12; Iss. 11

Gas source molecular beam epitaxy growth and characterization of modulation-doped field-effect transistor structures

Besikci, Cengiz, Civan, Yavuz, Ozder, Serhat, Sen, Ozlem, Jelen, Chris, Slivken, Steve, Razeghi, Manijeh
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Volume:
12
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/12/11/025
Date:
November, 1997
File:
PDF, 173 KB
english, 1997
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