Metal-assisted electrochemical etching of silicon
Huang, Z P, Geyer, N, Liu, L F, Li, M Y, Zhong, PVolume:
21
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/21/46/465301
Date:
November, 2010
File:
PDF, 767 KB
english, 2010