Study of an on-line precision microgroove generating process on silicon wafer using a developed ultra-thin diamond wheel-tool
Chen, Shun-Tong, Lin, Shing-JrVolume:
20
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2011.01.033
Date:
March, 2011
File:
PDF, 1.19 MB
english, 2011