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SPIE Proceedings [SPIE 28th European Mask and Lithography Conference (EMLC 2012) - Dresden, Germany (Tuesday 17 January 2012)] 28th European Mask and Lithography Conference - Lithographic aspects for the fabrication of BiCMOS embedded bio-MEMS and RF-MEMS
Kulse, P., Birkholz, M., Ehwald, K.-E., Kaynak, M., Wietstruck, M., Bauer, J., Drews, J., Schulz, K., Behringer, Uwe F.W., Maurer, WilhelmVolume:
8352
Year:
2012
Language:
english
DOI:
10.1117/12.918021
File:
PDF, 760 KB
english, 2012