Investigation of the physical properties of ion assisted ZrN thin films deposited by RF magnetron sputtering
Signore, M A, Valerini, D, Rizzo, A, Tapfer, L, Capodieci, L, Cappello, AVolume:
43
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/43/22/225401
Date:
June, 2010
File:
PDF, 728 KB
english, 2010