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SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - Experimental verification of a model-based decomposition method for double dipole lithography
Eurlings, Mark, Hsu, Stephen D., Hendrickx, Eric, op 't Root, Willem, Laidig, Thomas L., Chiou, Tsann-Bim, Chen, Alek, Chen, Fung, Vandenberghe, Geert, Finders, Jo, Smith, Bruce W.Volume:
5377
Year:
2004
Language:
english
DOI:
10.1117/12.535221
File:
PDF, 437 KB
english, 2004