![](/img/cover-not-exists.png)
A novel method to predict the pull-in voltage in a closed form for micro-plates actuated by a distributed electrostatic force
Chao, Paul C-P, Chiu, C-W, Tsai, C-YVolume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/5/016
Date:
May, 2006
File:
PDF, 730 KB
english, 2006