Fabrication of Si microstructures using focused ion beam...

Journal of Micromechanics and Microengineering 2008 / 03 Vol. 18; Iss. 3

Fabrication of Si microstructures using focused ion beam implantation and reactive ion etching

Qian, H X, Zhou, Wei, Miao, Jianmin, Lim, Lennie E N, Zeng, X R
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/3/035003
Date:
March, 2008
File:
PDF, 867 KB
english, 2008
Conversion to is in progress
Conversion to is failed