Effect of oxygen on the sputtering of aluminium targets...

Effect of oxygen on the sputtering of aluminium targets bombarded with argon ions

M. Bernheim, G. Slodzian
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
12
Year:
1973
Language:
english
Pages:
7
DOI:
10.1016/0020-7381(73)80090-7
File:
PDF, 301 KB
english, 1973
Conversion to is in progress
Conversion to is failed