Library-Based Illumination Synthesis for Critical CMOS...

IEEE Transactions on Image Processing 2013 / 07 Vol. 22; Iss. 7

Library-Based Illumination Synthesis for Critical CMOS Patterning

Jue-Chin Yu,, Peichen Yu,, Hsueh-Yung Chao,
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Volume:
22
Language:
english
Journal:
IEEE Transactions on Image Processing
DOI:
10.1109/TIP.2013.2253482
Date:
July, 2013
File:
PDF, 1.85 MB
english, 2013
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