![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE LASE - San Francisco, California (Saturday 23 January 2010)] Laser Applications in Microelectronic and Optoelectronic Manufacturing XV - Processing of metals and dielectric materials with ps-laserpulses: results, strategies, limitations and needs
Neuenschwander, Beat, Bucher, Guido F., Nussbaum, Christian, Joss, Benjamin, Muralt, Martin, Hunziker, Urs W., Schuetz, Peter, Niino, Hiroyuki, Meunier, Michel, Gu, Bo, Hennig, GuidoVolume:
7584
Year:
2010
Language:
english
DOI:
10.1117/12.846521
File:
PDF, 8.78 MB
english, 2010