Sub-15 nm linewidth gratings using roll-to-roll...

Sub-15 nm linewidth gratings using roll-to-roll nanoimprinting and plasma trimming to fabricate flexible wire-grid polarizers with low colour shift

Wu, Chien-Li, Sung, Cheng-Kuo, Yao, Po-Hung, Chen, Cheng-Huan
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Volume:
24
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/24/26/265301
Date:
July, 2013
File:
PDF, 1.86 MB
english, 2013
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