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SPIE Proceedings [SPIE SPIE Lithography Asia - Taiwan - Taipei, Taiwan (Tuesday 4 November 2008)] Lithography Asia 2008 - Extending KrF lithography beyond 80nm with the TWINSCAN XT:1000H 0.93NA scanner
de Boeij, Wim, Dicker, Gerald, de Wit, Marten, Bornebroek, Frank, Zellenrath, Mark, Voorma, Harm-Jan, Smeets, Bart, Toussaint, Rene, Paarhuis, Bart, de Jong, Marteijn, Hellweg, Dirk, Kornitzer, Klaus,Volume:
7140
Year:
2008
Language:
english
DOI:
10.1117/12.805381
File:
PDF, 852 KB
english, 2008