Relaxation of excited species in He/N 2 pulsed RF discharges: kinetics of metastable species
Benedictis, S De, Dilecce, GVolume:
4
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/4/2/005
Date:
May, 1995
File:
PDF, 879 KB
english, 1995