Simulation of the Bosch process with a string–cell hybrid...

Journal of Micromechanics and Microengineering 2004 / 07 Vol. 14; Iss. 7

Simulation of the Bosch process with a string–cell hybrid method

Zhou, Rongchun, Zhang, Haixia, Hao, Yilong, Wang, Yangyuan
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Volume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/7/003
Date:
July, 2004
File:
PDF, 699 KB
english, 2004
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