Cross-linked Polymer Replica of a Nanoimprint Mold at 30 nm...

Nano Letters 2005 / 01 Vol. 5; Iss. 1

Cross-linked Polymer Replica of a Nanoimprint Mold at 30 nm Half-pitch

Ge, Haixiong, Wu, Wei, Li, Zhiyong, Jung, Gun-Young, Olynick, Deirdre, Chen, Yanfeng, Liddle, J. Alexander, Wang, Shih-Yuan, Williams, R. Stanley
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Volume:
5
Language:
english
Journal:
Nano Letters
DOI:
10.1021/nl048618k
Date:
January, 2005
File:
PDF, 251 KB
english, 2005
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