Approaching nanometre accuracy in measurement of the...

Measurement Science and Technology 2012 / 07 Vol. 23; Iss. 7

Approaching nanometre accuracy in measurement of the profile deviation of a large plane mirror

Müller, Andreas, Hofmann, Norbert, Manske, Eberhard
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Volume:
23
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/23/7/074014
Date:
July, 2012
File:
PDF, 503 KB
english, 2012
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