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Deformation of nanostructures on polymer molds during soft UV nanoimprint lithography
Gilles, Sandra, Diez, Mar, Offenhäusser, Andreas, Lensen, Marga C, Mayer, DirkVolume:
21
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/21/24/245307
Date:
June, 2010
File:
PDF, 996 KB
english, 2010