AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - BF[sub 3] PIII modeling: Implantation, amorphisation and diffusion
Essa, Z., Cristiano, F., Spiegel, Y., Boulenc, P., Qiu, Y., Quillec, M., Taleb, N., Burenkov, A., Hackenberg, M., Bedel-Pereira, E., Mortet, V., Torregrosa, Frank, Tavernier, C.Year:
2012
Language:
english
DOI:
10.1063/1.4766532
File:
PDF, 920 KB
english, 2012
File converter
More search results
More benefits 
