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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Nanotechnology - MOS-based nanocapacitor using C-AFM
Hill, Daniel, Sadewasser, Sascha, Aymerich, Xavier, Vajtai, Robert, Aymerich, Xavier, Kish, Laszlo B., Rubio, AngelVolume:
5118
Year:
2003
Language:
english
DOI:
10.1117/12.498556
File:
PDF, 484 KB
english, 2003