Modeling of electron temperature and DC bias voltage in an...

Surface and Coatings Technology 2013 / 9 Vol. 231

Modeling of electron temperature and DC bias voltage in an inductively-coupled Cl2/Ar plasma using neural network

Kim, Moonkeun, Jang, Hanbyeol, Lee, Yong-Hwa, Kwon, Kwang-Ho, Park, Kang-Bak
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Volume:
231
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.07.040
Date:
September, 2013
File:
PDF, 549 KB
english, 2013
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