Indium Phosphide MEMS Cantilever Resonator Sensors...

Journal of Microelectromechanical Systems 2009 / 02 Vol. 18; Iss. 1

Indium Phosphide MEMS Cantilever Resonator Sensors Utilizing a Pentacene Absorption Layer

Siwak, N., Xiao Zhu Fan,, Hines, D., Kanakaraju, S., Goldsman, N., Ghodssi, R.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
18
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2008.2008600
Date:
February, 2009
File:
PDF, 638 KB
english, 2009
Conversion to is in progress
Conversion to is failed