Multiple Proton Diffusion and Film Densification in Atomic Layer Deposition Modeled by Density Functional Theory
Shirazi, Mahdi, Elliott, Simon D.Volume:
25
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm303630e
Date:
March, 2013
File:
PDF, 1.52 MB
english, 2013