Workfunction tuning of zinc oxide films by argon sputtering and oxygen plasma: an experimental and computational study
Kuo, Fang-Ling, Li, Yun, Solomon, Marvin, Du, Jincheng, Shepherd, Nigel DVolume:
45
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/45/6/065301
Date:
February, 2012
File:
PDF, 597 KB
english, 2012