Electrothermally Actuated RF MEMS Switches Suspended on a Low-Resistivity Substrate
Girbau, D., Pradell, L., Lazaro, A., Nebot, A.Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2007.904744
Date:
October, 2007
File:
PDF, 1.18 MB
english, 2007