SPIE Proceedings [SPIE SPIE Europe Optics + Optoelectronics - Prague, Czech Republic (Monday 20 April 2009)] Damage to VUV, EUV, and X-Ray Optics II - XUV metrology: surface analysis with extreme ultraviolet radiation
Banyay, M., Juschkin, L., Bücker, T., Loosen, P., Bayer, A., Barkusky, F., Döring, S., Peth, C., Mann, K., Blaschke, H., Balasa, I., Ristau, D., Juha, Libor, Bajt, Saša, Sobierajski, RyszardVolume:
7361
Year:
2009
Language:
english
DOI:
10.1117/12.833648
File:
PDF, 1.15 MB
english, 2009