Electron and chemical kinetics in methane rf glow-discharge...

Electron and chemical kinetics in methane rf glow-discharge deposition plasmas

Kline, Laurence E., Partlow, William D., Bies, William E.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
65
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.343378
File:
PDF, 1.14 MB
english, 1989
Conversion to is in progress
Conversion to is failed