Modeling the effect of mobile ion contamination on the stability of a microelectromechanical resonator
Haarahiltunen, A., Varpula, A., Savin, H.Volume:
110
Year:
2011
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3622511
File:
PDF, 868 KB
english, 2011