Mechanism of highly selective SiO 2...

Mechanism of highly selective SiO 2 contact hole etching

Matsui, Miyako, Tatsumi, Tetsuya, Sekine, Makoto
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Volume:
11
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/11/3A/330
Date:
August, 2002
File:
PDF, 105 KB
english, 2002
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