Design, Fabrication, and Characterization of a 240 $ \times$ 240 MEMS Uncooled Infrared Focal Plane Array With 42-$\mu \hbox{m}$ Pitch Pixels
Ou, Yi, Li, Zhigang, Dong, Fengliang, Chen, Dapeng, Zhang, Qingchuan, Xie, ChangqingVolume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2012.2227140
Date:
April, 2013
File:
PDF, 1.94 MB
english, 2013