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Cu-Al alloy formation by thermal annealing of Cu/Al multilayer films deposited by cyclic metal organic chemical vapor deposition
Moon, Hock Key, Yoon, Jaehong, Kim, Hyungjun, Lee, Nae-EungVolume:
19
Language:
english
Journal:
Metals and Materials International
DOI:
10.1007/s12540-013-3034-6
Date:
May, 2013
File:
PDF, 1.03 MB
english, 2013