![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Metrology, Inspection, and Process Control for Microlithography XV - Experimental determination of the impact of polysilicon LER on sub-100-nm transistor performance
Patterson, Kyle, Sturtevant, John L., Alvis, John R., Benavides, Nancy, Bonser, Douglas, Cave, Nigel, Nelson-Thomas, Carla, Taylor, William D., Turnquest, Karen L., Sullivan, Neal T.Volume:
4344
Year:
2001
Language:
english
DOI:
10.1117/12.436808
File:
PDF, 104 KB
english, 2001