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Polysilicon thermal microactuators for heat scavenging and power conversion
Tecpoyotl-Torres, MargaritaVolume:
8
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3152001
Date:
April, 2009
File:
PDF, 605 KB
english, 2009