An Untethered, Electrostatic, Globally Controllable MEMS...

An Untethered, Electrostatic, Globally Controllable MEMS Micro-Robot

Donald, B.R., Levey, C.G., McGray, C.D., Paprotny, I., Rus, D.
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Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2005.863697
Date:
February, 2006
File:
PDF, 1.70 MB
english, 2006
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