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PECVD synthesis and optical properties of BCXNY films obtained from N-triethylborazine as a single-source precursor
Sulyaeva, V.S., Kosinova, M.L., Rumyantsev, Yu.M., Kesler, V.G., Kuznetsov, F.A.Volume:
230
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.06.018
Date:
September, 2013
File:
PDF, 1.47 MB
english, 2013