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Low energy ion implantation using non-equilibrium glow discharge
Radovanov, Svetlana, Godet, LudovicVolume:
71
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/71/1/012014
Date:
May, 2007
File:
PDF, 1.27 MB
english, 2007