An apparatus for pulse chemical vapor deposition of layers

Instruments and Experimental Techniques 2013 / 05 Vol. 56; Iss. 3

An apparatus for pulse chemical vapor deposition of layers

Shevtsov, Yu. V., Kuchumov, B. M., Semenov, A. R., Igumenov, I. K.
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Volume:
56
Language:
english
Journal:
Instruments and Experimental Techniques
DOI:
10.1134/S002044121303010X
Date:
May, 2013
File:
PDF, 1.00 MB
english, 2013
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