![](/img/cover-not-exists.png)
In situ stress evolution of Co films sputtered onto oxidized Si (100) substrates
Pletea, M., BruÌckner, W., Wendrock, H., Kaltofen, R., Koch, R.Volume:
99
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2168243
File:
PDF, 556 KB
english, 2006