AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - USJ formation using solid phase epitaxial regrowth and femtosencond laser anneal
Shih, Tzu-Lang, Chen, Sheng-Wen, Wu, Chang-Peng, Cheng, Chung-Wei, Chien, Chih-Wei, Lee, Wen-HsiYear:
2012
Language:
english
DOI:
10.1063/1.4766506
File:
PDF, 933 KB
english, 2012