Simulation of Semiconductor Devices and Processes ||...

Simulation of Semiconductor Devices and Processes || Simulation of Sputter Deposition Process by DUPSIM

Selberherr, Siegfried, Stippel, Hannes, Strasser, Ernst

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Volume:

10.1007/97

Year:

1993

Language:

english

DOI:

10.1007/978-3-7091-6657-4_48

File:

PDF, 612 KB

english, 1993

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