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Simulation of Semiconductor Devices and Processes || Simulation of Sputter Deposition Process by DUPSIM
Selberherr, Siegfried, Stippel, Hannes, Strasser, ErnstVolume:
10.1007/97
Year:
1993
Language:
english
DOI:
10.1007/978-3-7091-6657-4_48
File:
PDF, 612 KB
english, 1993