Atomic and Electronic Structures of Traps in Silicon Oxide and Silicon Oxynitride
Gritsenko, Vladimir, Wong, HeiVolume:
36
Language:
english
Journal:
Critical Reviews in Solid State and Materials Sciences
DOI:
10.1080/10408436.2011.592622
Date:
July, 2011
File:
PDF, 1.39 MB
english, 2011